洁净室检测

{"STAN_STATUS":"现行" "STAN_CATEGORY":"地方标准" "STORE_COUNT":1 "TRANSLATION":"0000000001" "CARRIER":"加工电子" "NOTE1":"C3218-2" "STAN_PART_YEAR_STRING":"2009" "score":7926918.0 "STAN_PART_NUMBER_STRING":"0" "IMPL_DATE":1257696000000 "PDF_SINGLE_PATH":"123456.pdf" "STAN_NUM":"CNS 15186-2-2009" "PUB_DATE":1257696000000 "ID":11346 "STAN_ENNAME":"Cleanrooms and associated controlled environments – Part 2: Specifications for testing and monitoring to prove continued compliance with CNS 15186-1" "STAN_CONTENT":"[第1页]nICS 13.040.30 1n15186-2nC3218-2nCNSnCleanrooms and associated controlled environments – Part 2: Specifications nfor testing and monitoring to prove continued compliance with CNS 15186-1 n0.n2000 1 ISO 14644-2 Cleanrooms and associated ncontrolled environments – Part 2: Specifications for testing and monitoring to prove ncontinued compliance with ISO 14644-1n1.nCNS 15186-1nCNS 15186-1nCNS 15186-1n CNS 15186-1 ISO 14644-1 Cleanrooms and associated controlled nenvironments – Part 1: Classification of air cleanliness 1999n2.nCNS 15186-1 1nISO 14644-3 Cleanrooms and associated controlled environments – Part 3: Metrology nand test methods n3.n3.1n3.1.1 (requalification) n(test sequence)n(pre-test conditions) CNS n15186-1n3.1.2 (test) n1 (element)n( 6 )n98 11 9n98 11n[第2页]nCNS 15186-2 C 3218-2 n2n3.1.3 (monitoring) n3.2 (frequency intervals)n3.2.1 (continuous) n(updating)n3.2.2 (frequent) n60n3.2.3 6 (6 months) n183 190n3.2.4 12 (12 months) n366 400n3.2.5 24 (24 months) n731 800n4.n4.1n(ISO Class)n4.2n4.2.1 ISO Classn1n1nISO Class 5 6 CNS 15186-1 BnISO Class 5 12 CNS 15186-1 BnISO Classn4.2.2 2n[第3页]nCNS 15186-2 C 3218-2 n3n2nan( ) 12 ISO 14644-3 B.4nbn( ) 12 ISO 14644-3 B.5nISO Classnan( )nbn( )n4.2.3 1 2nAn4.2.4n1n4.2.5n2n4.2.6n4.2.7n4.2.8n(a)n(b)n(c)n(d)n4.3n4.3.1n4.3.2 Bn(count acceptance limits)n[第4页]nCNS 15186-2 C 3218-2 n4n1.n4.2.4 4.2.5n2.n4.3.3n4.2 An4.3.4n4.4n4.4.1 CNS 15186-1n(a)n(b)n(c) CNS 15186-1: 2008n(d)n(specified designations)n(e) ISO Classn(f) n(g) n(h) n4.2.4 4.2.5n4.4.2n4.5n[第5页]nCNS 15186-2 C 3218-2 n5nAn1 2 A.1nA.1nISO Class 24 ISO 14644-3 B.6nISO Class 24 ISO 14644-3 B.7nISO Class 24 ISO 14644-3 B.12nISO Class 24 ISO 14644-3 B.13n[第6页]nCNS 15186-2 C 3218-2 n6nBn(a)n(b)n(c)n(d) 2n(e) A.1nISO 14644-2:2000 Cleanrooms and associated controlled nenvironments – Part 2: Specifications for ntesting and monitoring to prove ncontinued compliance with ISO 14644-1 n[第7页]nNational Standards of the Republic of China CNS nstandardnNational Standards of the Republic of China CNSn(n) ( )nhttp://www.cnsonline.com.twnhttp://comments.bsmi.gov.twnhttp://techstandards.bsmi.gov.twnhttp://www.std.org.twnCNS MARK n40nCNSnhttp://www.cnsmark.org.twnhttp://cnsmark.bsmi.gov.twn Information n Publisher The Bureau of Standards Metrology and Inspection n1 4 Address 4 Chinan Road Section 1 Taipei 100 Taiwan n(02) 2343-1700 Telephone (886-2) 2343-1700 nhttp://www.bsmi.gov.tw Web site http://www.bsmi.gov.tw n" "STAN_PART_NUMBER":0 "STAN_PART_YEAR":2009 "STAN_CATEGORY_ORDER":4 "level":"[A]" "STAN_PART_PART_NUM":0 "STAN_CNNAME":"洁净室及其附属之控制环境－第2部：确保持续符合CNS　15186－1之测试与监测规范" "ICS_NAME":"13.040.30-工作场所空气" "STAN_STATUS_ORDER":1 "_version_":1758378938047922176 "ICS":"13.040.30" "STAN_PART_CODE":"CNS" "STAN_PART_PART_NUM_STRING":"0" "PAGE_COUNT":7 "EVENT_ID":"11346" "BASE_ORDER":1926918 "IS_FORCE_STAN":1} "NOTE1":"C3218-1" "STAN_PART_YEAR_STRING":"2008" "score":7926811.0 "IMPL_DATE":1216569600000 "STAN_NUM":"CNS 15186-1-2008" "PUB_DATE":1216569600000 "ID":11345 "STAN_ENNAME":"Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness" "STAN_CONTENT":"[第1页]nICS 13.040.30 1n15186-1 nC3218-1 nCNSnCleanrooms and associated controlled environments – Part 1: Classification nof air cleanliness n0. ................................................................................................................. 3 n1. ........................................................................................................... 3 n2. ........................................................................................................... 3 n2.1 ................................................................................................. 3 n2.2 .................................................................................................... 4 n2.3 ........................................................................................................... 4 n2.4 .................................................................................................... 5 n2.5 ........................................................................................................... 5 n3. ................................................................................................................. 5 n3.1 .................................................................................................... 5 n3.2 ........................................................................................................... 5 n3.3 ........................................................................................................... 6 n4. .................................................................................................... 6 n4.1 ........................................................................................................... 6 n4.2 ........................................................................................................... 6 n4.3 ................................................................................... 7 n4.4 .................................................................................................... 7 nA 1 .................................................................................. 8 nB .............................. 9 nB.1 ........................................................................................................... 9 nB.2 ................................................................................................. 9 nB.2.1 ....................................................................................... 9 nB.2.2 .............................................................................................. 9 nB.3 ............................................................................................. 9 nB.3.1 ................................................................................. 9 nB.3.2 ................................................................................. 9 nB.4 ........................................................................................................... 9 n( 27 )n97 7 21n97 7n[第2页]nCNS 15186-1 C 3218-1 n2nB.4.1 ...................................................................................... 9 nB.4.2 ................................................................. 10 nB.4.3 ............................................................................................. 10 nB.5 ........................................................................................ 10 nB.5.1 ..................................................................... 10 nB.5.2 95% (UCL) ............................................................ 11 nB.6 ........................................................................................ 11 nB.6.1 ......................................................................................... 11 nB.6.2 ...................................................................................... 11 nC ...................................................................... 12 nC.1 ......................................................................................................... 12 nC.2 ( ) ................................................... 12 nxninC.3 95% ....................................................................... 12 nC.3.1 ................................................................................................... 12 nxnC.3.2 ( ) ............................................................................. 12 nC.3.3 ........................................................................ 12 nC.3.4 95% ........................................................................ 12 nD ............................................................................. 14 nD.1 1 ...................................................................................................... 14 nD.2 2 ...................................................................................................... 17 nE ............... 19 nE.1 ......................................................................................................... 19 nE.2 0.1 μm U ..................................... 19 nE.2.1 ............................................................................................. 19 nE.2.2 U ..................................................................................... 19 nE.3 5 μm M .......................................... 19 nE.3.1 ............................................................................................. 19 nE.3.2 M ..................................................................................... 20 nF ....................................................................................... 21 nF.1 ............................................................................................... 21 nF.1.1 .................................................................................................... 21 nF.1.2 .................................................................................................... 21 nF.2 ............................................................................................... 21 nF.3 ................................................................................................... 23 nF.3.1 ................................................................................... 23 nF.3.2 ............................................................................... 23 nF.3.3 ............................................................................... 23 nG F ............................................................... 25 n[第3页]nCNS 15186-1 C 3218-1 n3n0.n1999 1 ISO 14464-1 (Cleanrooms and associated controlled nenvironments – Part 1: Classification of air cleanliness)n1.n(airborne)n(threshold) 0.1 μm 5 μmn(cumulative distributions) (particle populations)n0.1 μm 5 μmn(ultrafine) 0.1 μm (macroparticle) 5 μmnU Mn(viable nature)n(incremental size ranges)n2.n2.1 (general) n2.1.1 (cleanroom) n2.1.2 (clean zone) n2.1.3 (installation) n(service)n(utilities) 1n2.1.4 (classification) n(considered sizes of particles)nCNS(ISO) Nn1. 3.2 (1)n2. CNS(ISO) 1 CNS(ISO)n9n3.n[第4页]nCNS 15186-1 C 3218-1 n4n0.1 μm 5 μmnU M 2.3.1 2.3.2n4. CNS(ISO) 0.1nCNS(ISO) 1.1 CNS(ISO) 8.9n5. 3 (occupancy states) 2.4n2.2 (airborne particle) n2.2.1 (particle) n0.1 μm 5 μmn2.2.2 (particle size) n(response)n(equivalent)n(discrete-particle-counting)n(light-scattering instrument) (equivalent optical ndiameter)n2.2.3 (particle concentration) n2.2.4 (particle size distribution) n2.2.5 (ultrafine) n0.1 μmn2.2.6 (macroparticle) n5 μmn2.2.7 (fibre) n10n2.3 (descriptor) n2.3.1 U(U descriptor) nU (sampling locations)n(upper confidence limit)nUn2.3.2 M(M descriptor) nMn[第5页]nCNS 15186-1 C 3218-1 n5nMn2.4 (occupancy states) n2.4.1 (as-built) n2.4.2 (at-rest) n(customer) (supplier)n2.4.3 (operational) n2.5 (role)n2.5.1 (customer) n2.5.2 (supplier) n3.n3.1n3n2.4n3.2nN DnCnnn2.08n0.1nNn (1) nC 10nnnDnCnnnC 3nnnN CNS(ISO) 9 CNS(ISO)n0.1nD μmn0.1 μmn1nA.1 An(1) Cnnn[第6页]nCNS 15186-1 C 3218-1 n6n1nCNS(ISO)n3.2 (1)n(N) n0.1 μm 0.2 μm 0.3 μm 0.5 μm 1 μm 5 μm nCNS(ISO) 1 10 2 nCNS(ISO) 2 100 24 10 4 nCNS(ISO) 3n1 000 237 102 35 8 nCNS(ISO) 4 10 000 2 370 1 020 352 83 nCNS(ISO) 5n100 000 23 700 10 200 3 520 832 29 nCNS(ISO) 6 1 000 000 237 000 102 000 35 200 8 320 293 nCNS(ISO) 7 352 000 83 200 2 930 nCNS(ISO) 8n3 520 000 832 000 29 300 nCNS(ISO) 9 35 200 000 8 320 000 293 000 n3n3.3 (designation) n(a) CNS(ISO) Nn(b)n(c) 0.1 μm 5 μmn(1)nCNS(ISO) 4n3 3n0.2 μm 2 370 /m 1 μm 83 /mn1 Dn2nD 1.5n1nD 1.5 ×Dn2 1n4.n4.1nCNS(ISO)n4.2nBn[第7页]nCNS 15186-1 C 3218-1 n7n4.3n4.2 C 95%n(95% upper confidence limit)n(C.1) 3.3 (c)n3.2 (1)n2 9 (C.3)n95%nDn4.4n(a)n(b) CNS 15186-1(ISO 14644-1)n(c)n(d) CNS(ISO)n(e)n(f) nEn[第8页]nCNS 15186-1 C 3218-1 n8nAn1nA.1 1 1nCNS(ISO) 3.2n(1)n(1)nCNS(ISO)nA.1 CNS(ISO)n1. Cnnn2. N CNS(ISO)n[第9页]nCNS 15186-1 C 3218-1 n9nBnB.1nB.2nB.2.1n(DPC)nB.2.2nB.3nB.3.1n(a)n(b)n(c)n(d)nB.3.2nB.4nB.4.1nB.4.1.1 (B.1)n (B.1) nN AnLnNnLn2nA mn(unidirectional horizontal) AnB.4.1.2n(critical)n[第10页]nCNS 15186-1 C 3218-1 n10nB.4.2nB.4.2.1 CNS(ISO)n20nV (B.2)nsn20n (B.2) nV 1000nsnCnn mnV L (nsnB.4.2.2nCnn mn20nVnsn(sequential sampling procedure) FnB.4.2.2 2 L 1nB.4.3nB.4.3.1nB.2.1nB.4.3.2 (sampling probe) (pointing into)n( )nB.4.3.3 B.4.2nB.4.3.4 1 B.4.1 3nB.4.2nB.5nB.5.1nB.5.1.1n3.3n95% B.6.1nB.5.1.2 1nB.4.3.4nB.5.1.3 1 2 C.2nB.5.1.1nB.5.2 95% (UCL)nB.5.2.1 1 10 C.3nB.5.1n[第11页]nCNS 15186-1 C 3218-1 n11n95%nB.5.2.2 1 9 95%nB.6nB.6.1nB.5.2 95%n3.2 (1)nB.6.2 (outlier)n95% CNS(ISO)n(a)n(b) 3n(c) 1n(d)n[第12页]nCNS 15186-1 C 3218-1 n12nCnC.1 nxninC.2 ( )n1 (C.1)n2nx x xni 1 i 2 i nn (C.1) nxinnni inxinx xni nnn inC.3 95%nC.3.1 n1 10n(C.1)nC.3.2 ( x)n(C.2)nxi 1 xi 2 xi mn (C.2) nxnmnxn(C.1)nx xni mnmn(weighted)nC.3.3 n(C.3)n2 2 2nx x x x x xni mn (C.3) nsnm 1nsnC.3.4 95%n(C.4) 95%n[第13页]nCNS 15186-1 C 3218-1 n13nsn (C.4) n95%UCL x tn0.95nmnt m-1 t 95n0.95nC.1 95%UCL (Student ’s)t (t )n0.95ntnC.1 95% tn234 5 6 7-9 n(m) nt 6.3 2.9 2.4 2.1 2.0 1.9 n[第14页]nCNS 15186-1 C 3218-1 n14nDn)nD.1 1n2nD.1.1 (A) 80 mnCNS(ISO) 5nD.1.2 0.3 μm(D ) 0.5 μm(D )n1 2n(a) 2 CNS(ISO) 5 3.3 (c)n1 0.1 μm 0.3 μm 0.5 μm 5 μm n(b) D 1.5 ×D 3.3 (c) 0.5 μm n2 1n(1.5 ×0.3 μm = 0.45 μm) nD.1.3 (1) 3.2n0.3 μm(D )n1n2.08n0.1n5n (D.1) nC 10 10176nnn0.3n3n10 200 /mn0.5 μm(D )n2n2.08n0.1n5n (D.2) nC 10 3517nnn0.5n3n3 520 /mnD.1.4 (B.1) B.4.1.1n9 (D.3) nN A 80 8.94nLn9 10 C 95%nD.1.5 (B.2) B.4.2.1n20 20n (D.4) nV 1000 1000 5.69LnsnC 3517nn mn2 L 1 28 Ln(a) V >2L B.4.2.2nsn3n(b) C >20 /m B.4.2.1nn mn(c) 1 B.4.2.2nD.1.6 (28 L) B.4.2.1n[第15页]nCNS 15186-1 C 3218-1 n15n( 0.3 μm) ( 0.5 μm) n1 245 21 n2 185 24 n3 59 0 n4 106 7 n5 164 22 n6 196 25 n7 226 23 n8 224 37 n9 195 19 nD.1.7 D.1.6 xninx 0.3 μm x 0.5 μmni in1 8 750 750n2 6 607 857n3 2 107 0n4 3 786 250n5 5 857 786n6 7 000 893n7 8 071 821n8 8 000 1 321n9 6 964 679n0.3 μm 0.5 μm D.1.3nB.6.1nC 95%n1 1 1 000 L 28 Ln0.3 μm xnin(1 000/28) ×245 = 8 750nD.1.8 n(C.1) C.2n(C.2) C.3.2n0.3 μmn[第16页]nCNS 15186-1 C 3218-1 n16n8750 6607 2107 3786n1n (D.5) nx 5857 7000 8071 8000n9n6964n1n57142n9n3n6349.1n6 349 /mn0.5 μmn1n750 857 0 250 786n (D.6) nxn893 821 1321 679n9n1n6357n9n3n706 /mn706.3nD.1.9 (C.3) C.3.3n0.3 μmn2 2n8750 6349 6607 6349n2 2n2107 6349 3786 6349n1n2 2n2n (D.7) ns 5857 6349 7000 6349n2 2n8n8071 6349 8000 6349n2n6964 6349n1n37130073n8n4 641 259n4641259.1n (D.8) ns 4641259n3n2 154 /m )n2154.4n[第17页]nCNS 15186-1 C 3218-1 n17n0.5 μmn2 2n750 706 857 706n2 2n0 706 250 706n1n2 2 2n (D.9) ns 786 706 893 706n2 2n8n821 706 1321 706n2n679 706n1n1164657n8n145 582n145582.1n (D.10) ns 145582n3n382 /mn381.6nD.1.10 (C.4) C.3.4 95% (UCL)nm=9 C.1 t t=1.9n2154n95%UCL 0.3 m 6349 1.9n9n3n7 713 /m (D.11) n7713.2n382n95%UCL 0.5 m 706 1.9n9n3n948 /m (D.12) n947.9nD.1.11 B.6.1 D.1.7nD.1.10n95% (UCL) D.1.3nD.2 2nD.2.1 95% (UCL)nCNS(ISO) 3n5 1 10 Cn95%n1 (D 0.1 μm)nD.2.2 0.1 μm CNS(ISO) 3 1n3nC ( 0.1 μm) = 1 000 /mnnn[第18页]nCNS 15186-1 C 3218-1 n18nD.2.3 B.1.1nxnin x 0.1 μm nin1 926 n2 958 n3 937 n4 963 n5 214 nD = 0.1 μm D.2.2nB.6.1 C 95%nD.2.4 (C.2) C.3.2n1nx 926 958 937 963 214n5n1n (D.13) n3998n5n3n799.6 800 /mnD.2.5 (C.3) C.3.3n2 2n926 800 958 800n1n2 2n2ns 937 800 963 800n4n2n214 800n1n (D.14) n429574n4n107393.5 107 394n3n328 /m (D.15) ns 107394 327.7nD.2.6 (C.4) C.3.4 95% (UCL)nm = 5 C.1 t t=2.1n328 3n/m (D.16) n95%UCL 800 2.1 1108n5nD.2.7 D.2.2n95%n1 5 95% (UCL)n1 95% UCLnB.6.2n[第19页]nCNS 15186-1 C 3218-1 n19nEnE.1nE.2 U E.3 MnE.2 0.1 μm UnE.2.1n0.1 μmnB.4.1 V 2L B.4.2.2nsnE.2.2 UnUnUn“U (x; y) ” nxny μmn50%n0.01 μm 140 000n3n/m “U (140 000; 0.01 μm) ”n1. 0.1 μmnIEST-G-CC1002 [1]n2. Un(x) CNS(ISO) 0.1 μmnE.3 5 μm MnE.3.1n5 μmn(application-specific basis)n[第20页]nCNS 15186-1 C 3218-1 n20nE.3.2 MnM Mn“M (a; b); c ” nanb μmncn1. Mn“M (a; b); c ”nfibren1 (aerodynamic diameter)n(time-of-flight aerosol particle counter) 5 μmn3n10 000 /mn“M (10 000; 5 μm) ”n2 (cascade impactor)n(microscopic sizing and counting) 10 μm 20 μmn3n1 000 /mn“M (1 000; 10 μm 20 μm) ”n2. 5 μmnIEST-G-CC1003 [2]n3. M (a)nCNS(ISO) 5 μmn( )n[第21页]nCNS 15186-1 C 3218-1 n21nFnF.1 nF.1.1 n(sequential sampling)nCNS(ISO) 4nIEST-G-CC1004 [3]nF.1.2 n(a)n20n(b)n(c)nF.2 n(real time)nC = 3.96+1.03 E (F.1) nC = -3.96+1.03 E (F.2) nCnEnF.1 F.1 2n(running)n[第22页]nCNS 15186-1 C 3218-1 n22nF.1n25nC=3.96+1.03E n20n15n10n5nC=-3.96+1.03E n0n0 5 10 15 20nEnF.1nC Cnt tn0.0019 4 0.1922 0 n0.0505 5 0.2407 1 n0.0992 6 0.2893 2 n0.1476 7 0.3378 3 n0.1961 8 0.3864 4 n0.2447 9 0.4349 5 n0.2932 10 0.4834 6 n0.3417 11 0.5320 7 n0.3902 12 0.5805 8 n0.4388 13 0.6291 9 n0.4873 14 0.6676 10 n0.5359 15 0.7262 11 n0.5844 16 0.7747 12 n0.6330 17 0.8233 13 n0.6815 18 0.8718 14 n0.7300 19 0.9203 15 n0.7786 20 0.9689 16 n1.0000 21 1.0000 17 nt = 1.0000nCn[第23页]nCNS 15186-1 C 3218-1 n23nF.1n20 /nC EnF.1 Cn21nF.3 nF.3.1 n2n(progressive computerized analysis)nF.3.2 nF.1 (F.1) (F.2) E=20nC=20nE=20nF.1nF.1n20nF.3.3 nF.1 (F.1) (F.2)nt 1.0000n20nF.1n2n[第24页]nCNS 15186-1 C 3218-1 n24n2n21n[第25页]nCNS 15186-1 C 3218-1 n25nGnFn)nG.1 F.1nG.2 (F.1) (F.2)nG.2n1/20 1/20nG.1n[第26页]nCNS 15186-1 C 3218-1 n26nG.1 (F.1) (F.2)nC Cn0 n3.96n1 4.99 n2 6.02 n3 7.05 n4 8.08 4 0.16 n5 9.11 5 1.19 n6 10.14 6 2.22 n7 11.17 7 3.25 n8 12.2 8 4.28 n9 13.23 9 5.31 n10 14.26 10 6.34 n11 15.29 11 7.37 n12 16.32 12 8.4 n13 17.35 13 9.43 n14 18.38 14 10.46 n15 19.41 15 11.49 n16 20.44 16 12.52 n17 20.44 17 13.55 n18 20.44 18 14.58 n19 20.44 19 15.61 n20 20.44 20 16.64 n[第27页]nCNS 15186-1 C 3218-1 n27n[1] IEST-G-CC1002 Determination of the concentration of airborne ultrafine particles. nMount prospect Illinois: Institute of environmental sciences and technology (1999) n[2] IEST-G-CC1003 Measurement of airborne macroparticles. Mount prospect Illinois: nInstitute of environmental sciences and technology (1999) n[3] IEST-G-CC1004 Sequential sampling plan for use in classification of the particulate ncleanliness of air in cleanrooms and clean zones. Mount prospect Illinois: Institute of nenvironmental sciences and technology (1999) nISO 14644-1:1999 Cleanrooms and associated controlled nenvironments – Part 1: Classification of nair cleanliness n[第28页]nNational Standards of the Republic of China CNS nstandardnNational Standards of the Republic of China CNSn(n) ( )nhttp://www.cnsonline.com.twnhttp://standards.bsmi.gov.twnhttp://techstandards.bsmi.gov.twnhttp://www.std.org.twnCNS MARK n40nCNSnhttp://www.cnsmark.org.twnhttp://cnsmark.bsmi.gov.twn Information n Publisher The Bureau of Standards "STAN_PART_YEAR":2008 "STAN_CNNAME":"洁净室及其附属之控制环境－第1部：空气清净度之分级" "_version_":1758378938349912064 "PAGE_COUNT":28 "EVENT_ID":"11345" "BASE_ORDER":1926811 {"DRAFT_ORG":"中国电子工程设计研究院;苏州市洁净室科技促进中心;中国药品、生物制品检定所;浙江盾安机电科技有限公司;江苏姑芳净化科技有限公司;江苏苏净科技有限公司;苏净集团苏州安泰空气技术有限公司;中国石化集团上海工程有限公司;爱思克空气系统产品（苏州）有限公司;苏州市碧海永乐净化科技有限公司;南京埃科净化技术有限公司;深圳市丽风空调净化技术有限公司" "STAN_STATUS":"现行" "STAN_CATEGORY":"团体标准" "TRANSLATION":"0000000000" "score":7868287.0 "STAN_PART_NUMBER_STRING":"127" "IMPL_DATE":1248019200000 "STAN_NUM":"CAS 127.1-2009" "PUB_DATE":1248019200000 "ID":1597 "CREATE_TIME":1404264041000 "STAN_PART_NUMBER":127 "STAN_CATEGORY_ORDER":5 "STAN_PART_PART_NUM":1 "STAN_CNNAME":"洁净室及相关受控环境 第1部分:空气洁净度等级" "_version_":1758379010280128512 "STAN_PART_CODE":"CAS" "STAN_PART_PART_NUM_STRING":"1" "EVENT_ID":"1597" "BASE_ORDER":1868287 "IS_FORCE_STAN":4}